<http://webisa.webdatacommons.org/prov/464659360>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/123230539> .
<http://webisa.webdatacommons.org/123230539>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.fr> .
<http://webisa.webdatacommons.org/prov/131315628>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/123230539> .
<http://webisa.webdatacommons.org/123230539>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/123230539>	<http://www.w3.org/ns/prov#value>	"As shown in FIGS. 1, 5 and 6, a plurality of via holes 18 penetrate the substance 12, and a metal such as Mo and W is filled into the via holes 18." .