<http://webisa.webdatacommons.org/123369301>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/288975818>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/123369301> .
<http://webisa.webdatacommons.org/123369301>	<http://www.w3.org/ns/prov#value>	"silicon nitride film with such a thickness is arranged as a gate" .
<http://webisa.webdatacommons.org/123369301>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<faqs.org> .