<http://webisa.webdatacommons.org/123673942>	<http://www.w3.org/ns/prov#value>	"FIGS. 11A and 11B are a sectional view and plan view, respectively, for explaining a conventional multi-charged-particle beam exposure apparatus." .
<http://webisa.webdatacommons.org/123673942>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/251483961>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/123673942> .
<http://webisa.webdatacommons.org/123673942>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<docstoc.com> .
<http://webisa.webdatacommons.org/prov/246706997>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/123673942> .
<http://webisa.webdatacommons.org/prov/250973366>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/123673942> .