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<http://webisa.webdatacommons.org/prov/318617557>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/125001258> .
<http://webisa.webdatacommons.org/125001258>	<http://www.w3.org/ns/prov#value>	"Bridges 108 can be used to form passages and other three dimensional structures in the multilayer MEMS device 100." .
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