<http://webisa.webdatacommons.org/126327147>	<http://www.w3.org/ns/prov#value>	"FIG. 5A is a plan view of the TFT array substrate shown in FIG. 3 illustrating the first step of processing the same;" .
<http://webisa.webdatacommons.org/126327147>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/332764365>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/126327147> .
<http://webisa.webdatacommons.org/126327147>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .