<http://webisa.webdatacommons.org/126345535>	<http://www.w3.org/ns/prov#value>	"FIG. 10 is a plan view illustrating an inspection apparatus according to a third embodiment of the present invention." .
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<http://webisa.webdatacommons.org/126345535>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/249871572>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/126345535> .