<http://webisa.webdatacommons.org/12672337>	<http://www.w3.org/ns/prov#value>	"N pieces of dielectric films having the different film thickness mutually may be formed by repeating a series of steps n times (where n is an integer of 2 or more)." .
<http://webisa.webdatacommons.org/prov/299094374>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/12672337> .
<http://webisa.webdatacommons.org/12672337>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/12672337>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .