<http://webisa.webdatacommons.org/prov/333837445>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/12750166> .
<http://webisa.webdatacommons.org/12750166>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/12750166>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/12750166>	<http://www.w3.org/ns/prov#value>	"FIG. 3a is a top plan view of the wafer loading/unloading apparatus 100 of FIG. 2a." .