<http://webisa.webdatacommons.org/prov/283706122>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/128247140> .
<http://webisa.webdatacommons.org/prov/45356705>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/128247140> .
<http://webisa.webdatacommons.org/128247140>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/128247140>	<http://www.w3.org/ns/prov#value>	"material, such as silicon oxide, silicon nitride, silicon oxynitride, or" .
<http://webisa.webdatacommons.org/128247140>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<faqs.org> .