<http://webisa.webdatacommons.org/prov/253619806>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/128407484> .
<http://webisa.webdatacommons.org/128407484>	<http://www.w3.org/ns/prov#value>	"method for manufacturing a semiconductor device including a transistor." .
<http://webisa.webdatacommons.org/128407484>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/128407484>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<patents.com> .