<http://webisa.webdatacommons.org/128466166>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/128466166>	<http://www.w3.org/ns/prov#value>	"echnology, Inc.Carrier assemblies, planarizing apparatuses including carrier assemblies, and methods" .
<http://webisa.webdatacommons.org/128466166>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com.au> .
<http://webisa.webdatacommons.org/prov/421373531>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/128466166> .
<http://webisa.webdatacommons.org/prov/448318246>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/128466166> .