<http://webisa.webdatacommons.org/129091408>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/129091408>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<freepatentsonline.com> .
<http://webisa.webdatacommons.org/prov/44841542>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/129091408> .
<http://webisa.webdatacommons.org/129091408>	<http://www.w3.org/ns/prov#value>	"Aluminum nitride is a material with a significantly higher hardness than PZT or any metal, ensuring low friction between the material 12 and heat sinks 16 and 18, and low losses." .