<http://webisa.webdatacommons.org/prov/8877839>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/129228016> .
<http://webisa.webdatacommons.org/129228016>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/129228016>	<http://www.w3.org/ns/prov#value>	"It is preferable that a water-soluble organic solvent which can be used in this case is a solvent which does not dissolve the resist pattern." .
<http://webisa.webdatacommons.org/129228016>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.fr> .