<http://webisa.webdatacommons.org/129287170>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/129287170>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/46371079>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/129287170> .
<http://webisa.webdatacommons.org/prov/45356710>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/129287170> .
<http://webisa.webdatacommons.org/129287170>	<http://www.w3.org/ns/prov#value>	"Other materials including silicon dioxide, silicon, silicon nitride, silicon oxynitride, boron nitride, etc. may be used as the reticle base." .