<http://webisa.webdatacommons.org/129676506>	<http://www.w3.org/ns/prov#value>	"FIG. 2 is a plan view showing an upper portion of the showerhead of the CVD film-forming apparatus of the embodiment according to the present invention;" .
<http://webisa.webdatacommons.org/prov/249871564>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/129676506> .
<http://webisa.webdatacommons.org/129676506>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/129676506>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .