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<http://webisa.webdatacommons.org/13037740>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
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<http://webisa.webdatacommons.org/13037740>	<http://www.w3.org/ns/prov#value>	"FIG. 9A, 9B and 9C are a perspective views of a cylindrical magnetron sputtering system, and a certain optional element therefore, according to the present invention;" .