<http://webisa.webdatacommons.org/133383497>	<http://www.w3.org/ns/prov#value>	"layers; a fifth insulating layer including silicon nitride over the" .
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<http://webisa.webdatacommons.org/133383497>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<faqs.org> .