<http://webisa.webdatacommons.org/133553773>	<http://www.w3.org/ns/prov#value>	"layer, another material such as amorphous silicon nitride, titanium" .
<http://webisa.webdatacommons.org/prov/33838066>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/133553773> .
<http://webisa.webdatacommons.org/133553773>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/133553773>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<patents.com> .
<http://webisa.webdatacommons.org/prov/45356711>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/133553773> .