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<http://webisa.webdatacommons.org/prov/339540098>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/134762529> .
<http://webisa.webdatacommons.org/134762529>	<http://www.w3.org/ns/prov#value>	"The sputtering, power and other parameters are adjusted in" .
<http://webisa.webdatacommons.org/134762529>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<patents.com> .