. . . "se where the number of data points is reduced using the embodiment, FIG. 12 shows an FF control result of a gate electrode wire width, FIG. 13 shows an example of wire width measurement obtained in the case where a plurality of patterns are present within a measurement image, FIGS. 14A and 14B are a plan view and a sectional view of a gate electrode, and FIG. 15 shows a control system in the case" . .