<http://webisa.webdatacommons.org/137193206>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/122776868>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/137193206> .
<http://webisa.webdatacommons.org/137193206>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/137193206>	<http://www.w3.org/ns/prov#value>	"In the preferred embodiment, thin film structure 30 comprises alternating layers of polyimide, benzocyclobutene (BCB), or other suitable organic polymer, and copper, aluminum or other suitable metal." .
<http://webisa.webdatacommons.org/prov/363606107>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/137193206> .