<http://webisa.webdatacommons.org/prov/45356744>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/137930585> .
<http://webisa.webdatacommons.org/prov/65978717>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/137930585> .
<http://webisa.webdatacommons.org/137930585>	<http://www.w3.org/ns/prov#value>	"The microcantilever 102 and the substrate 104 can be fabricated from materials such as silicon, silicon nitride, other semiconductors, or other similar materials or combinations thereof." .
<http://webisa.webdatacommons.org/137930585>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/137930585>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .