<http://webisa.webdatacommons.org/139087417>	<http://www.w3.org/ns/prov#value>	"Accordingly, what is needed is an improved system and method for accurately estimating the degree of optical and process correction necessary for a given feature." .
<http://webisa.webdatacommons.org/prov/143524013>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/139087417> .
<http://webisa.webdatacommons.org/139087417>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/139087417>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .