<http://webisa.webdatacommons.org/140848091>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/249871573>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/140848091> .
<http://webisa.webdatacommons.org/140848091>	<http://www.w3.org/ns/prov#value>	"FIG. 11 is a plan view showing a trace of scanning exposure on a wafer in the second embodiment;" .
<http://webisa.webdatacommons.org/140848091>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .