<http://webisa.webdatacommons.org/141018089>	<http://www.w3.org/ns/prov#value>	"FIG. 11A is a perspective view of the illumination system of the exposure apparatus in the present invention, and FIG. 11B is a perspective view showing the state of polarization;" .
<http://webisa.webdatacommons.org/141018089>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com.au> .
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<http://webisa.webdatacommons.org/prov/251483953>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/141018089> .