<http://webisa.webdatacommons.org/141139398>	<http://www.w3.org/ns/prov#value>	"FIG. 11A is a plan view schematically showing substrate transport paths in the first embodiment;" .
<http://webisa.webdatacommons.org/141139398>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<docstoc.com> .
<http://webisa.webdatacommons.org/prov/250973366>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/141139398> .
<http://webisa.webdatacommons.org/141139398>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .