<http://webisa.webdatacommons.org/141481088>	<http://www.w3.org/ns/prov#value>	"bstrate (ultrasonic stripping process).The foregoing second stripping section is a single-substrate resist-stripping device as shown in FIG. 21, and it is arranged in a manner" .
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<http://webisa.webdatacommons.org/prov/273819237>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/141481088> .
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