<http://webisa.webdatacommons.org/141807847>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/141807847>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.co.uk> .
<http://webisa.webdatacommons.org/141807847>	<http://www.w3.org/ns/prov#value>	"FIG. 1, which illustrates the principle of the present invention, is a plan view for explaining the manner in which field-of-view is displaced on a wafer;" .
<http://webisa.webdatacommons.org/prov/151275828>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/141807847> .