. . . . "Suitable substrates include, but are not limited to, materials such as gallium arsenide (???GaAs???), silicon, tantalum, copper, ceramics, aluminum/copper alloys, polyimides, and compositions containing silicon such as crystalline silicon, polysilicon, amorphous silicon, epitaxial silicon, silicon dioxide (???SiO2???), silicon nitride, doped silicon dioxide, and the like." . .