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<http://webisa.webdatacommons.org/142286546>	<http://www.w3.org/ns/prov#value>	"Substrate 32 is preferably made of an insulating material, such as Vycor??? or Pyrex??? glass, or a high resistivity silicon." .
<http://webisa.webdatacommons.org/142286546>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.es> .
<http://webisa.webdatacommons.org/prov/45356876>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/142286546> .
<http://webisa.webdatacommons.org/prov/298706271>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/142286546> .