<http://webisa.webdatacommons.org/14259461>	<http://www.w3.org/ns/prov#value>	"The dielectric 22 comprises a dielectric material, such as for example at least one of silicon oxide, silicon nitride or a low k dielectric." .
<http://webisa.webdatacommons.org/14259461>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/45356708>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/14259461> .
<http://webisa.webdatacommons.org/prov/44841554>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/14259461> .
<http://webisa.webdatacommons.org/14259461>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/283742616>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/14259461> .