<http://webisa.webdatacommons.org/prov/236276422>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/147841951> .
<http://webisa.webdatacommons.org/147841951>	<http://www.w3.org/ns/prov#value>	"The barrier metal layer may be formed of a metal nitride such as TiN, TaN or WNx, or a laminate such as TiN/Ti or Ta/TaN." .
<http://webisa.webdatacommons.org/147841951>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com.au> .
<http://webisa.webdatacommons.org/147841951>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .