<http://webisa.webdatacommons.org/prov/281611032>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/148333616> .
<http://webisa.webdatacommons.org/148333616>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.es> .
<http://webisa.webdatacommons.org/148333616>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/148333616>	<http://www.w3.org/ns/prov#value>	"elivery apparatus 830 is disposed at an upper portion of the chamber body 782 to provide a gas, such as a process gas or a purge gas, to the chamber 780." .