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<http://webisa.webdatacommons.org/148441771>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<patents.com> .
<http://webisa.webdatacommons.org/prov/26739157>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/148441771> .
<http://webisa.webdatacommons.org/148441771>	<http://www.w3.org/ns/prov#value>	"exposure mask 1c of Embodiment 3 of the present invention is a pattern" .