<http://webisa.webdatacommons.org/148920785>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/148920785>	<http://www.w3.org/ns/prov#value>	"Alteration of the beam may also enhance etching, deposition, and other processes." .
<http://webisa.webdatacommons.org/148920785>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.es> .
<http://webisa.webdatacommons.org/prov/219679915>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/148920785> .