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<http://webisa.webdatacommons.org/150342802>	<http://www.w3.org/ns/prov#value>	"FIGS. 11A and 11B respectively are a front view and a side view showing a third embodiment of the substrate processing apparatus according to the present invention;" .
<http://webisa.webdatacommons.org/150342802>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/150342802>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .