<http://webisa.webdatacommons.org/151022215>	<http://www.w3.org/ns/prov#value>	"FIGS. 14A through 14E are cross-sectional views illustrating a third embodiment of the method for manufacturing a top-gate type TFT according to the present invention, and FIG. 15 is a plan view of the TFT of FIG. 14F, which is a cross-sectional view taken along the line IV--IV of FIG. 15." .
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