<http://webisa.webdatacommons.org/prov/65978717>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/152347304> .
<http://webisa.webdatacommons.org/152347304>	<http://www.w3.org/ns/prov#value>	"Suitable material for the dielectric layer 34 is insulating oxide, nitride, carbide or combinations thereof, such as silicon nitride, silicon oxide, aluminum oxide, magnesium oxide, aluminum nitride or magnesium fluoride." .
<http://webisa.webdatacommons.org/152347304>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/436239337>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/152347304> .
<http://webisa.webdatacommons.org/152347304>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .