<http://webisa.webdatacommons.org/prov/228728934>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/152401949> .
<http://webisa.webdatacommons.org/152401949>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/152401949>	<http://www.w3.org/ns/prov#value>	"Further, light-shielding patterns over the mask, for transferring patterns for circuit regions other than the above are formed of a metal." .
<http://webisa.webdatacommons.org/152401949>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .