<http://webisa.webdatacommons.org/prov/328759687>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/152832698> .
<http://webisa.webdatacommons.org/152832698>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/152832698>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/152832698>	<http://www.w3.org/ns/prov#value>	"In recent years, however, it has been proposed to form the insulating films from materials having more excellent insulating properties, such as metal oxides, e.g., tantalum oxide (Ta2O5), or high-dielectric or ferroelectric bodies containing two metal elements or more, e.g., (Ba,Sr)TiO3, i.e., BST. These films can be formed by means of MOCVD, i.e., using vaporized metal organic compounds." .