<http://webisa.webdatacommons.org/prov/457674565> <http://www.w3.org/ns/prov#wasDerivedFrom> <http://webisa.webdatacommons.org/152839996> . <http://webisa.webdatacommons.org/152839996> <http://www.w3.org/1999/02/22-rdf-syntax-ns#type> <http://www.w3.org/ns/prov#Entity> . <http://webisa.webdatacommons.org/152839996> <http://www.w3.org/ns/prov#value> "In a deposition chamber which is evacuated with a cryopump, hydrogen atoms, compounds including hydrogen atoms such as water (H 2 0) (more preferably, compounds including carbon atoms in addition), and the like are exhausted." . <http://webisa.webdatacommons.org/152839996> <http://www.w3.org/ns/prov#wasQuotedFrom> <sumobrain.com> . <http://webisa.webdatacommons.org/prov/167580800> <http://www.w3.org/ns/prov#wasDerivedFrom> <http://webisa.webdatacommons.org/152839996> .