<http://webisa.webdatacommons.org/prov/457674565>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/152839996> .
<http://webisa.webdatacommons.org/152839996>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/152839996>	<http://www.w3.org/ns/prov#value>	"In a deposition chamber which is evacuated with a cryopump, hydrogen atoms, compounds including hydrogen atoms such as water (H 2 0) (more preferably, compounds including carbon atoms in addition), and the like are exhausted." .
<http://webisa.webdatacommons.org/152839996>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<sumobrain.com> .
<http://webisa.webdatacommons.org/prov/167580800>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/152839996> .