<http://webisa.webdatacommons.org/prov/45356714>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/155432618> .
<http://webisa.webdatacommons.org/prov/62320260>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/155432618> .
<http://webisa.webdatacommons.org/155432618>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.es> .
<http://webisa.webdatacommons.org/155432618>	<http://www.w3.org/ns/prov#value>	"The reservoir 134 may be in the base 124 below the chuck 122 to provide more control over the temperature of the chuck 122, particularly when the chuck 122 is made of a ceramic material, such as aluminum nitride, aluminum oxide, or silicon oxide." .
<http://webisa.webdatacommons.org/155432618>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .