. . "FIG. 11 shows a damper portion in a sixth embodiment, FIG. 11A is a plan view as seen from the rear face, FIG. 11B is a section view taken along the line P-P in FIG. 11A, FIG. 11C is a section view taken along the line Q-Q in FIG. 11A, and FIG. 11D is a section view taken along the line R-R in FIG. 11A. FIG. 12A is a plan view showing an irradiation area of laser in laser processing, and FIG. 12B" . .