<http://webisa.webdatacommons.org/159646097>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/159646097>	<http://www.w3.org/ns/prov#value>	"The alignment mark structure of claim 1, wherein the metal wiring layers comprise one or more metals including copper." .
<http://webisa.webdatacommons.org/prov/122776886>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/159646097> .
<http://webisa.webdatacommons.org/159646097>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .