<http://webisa.webdatacommons.org/16040808>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/288195952>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/16040808> .
<http://webisa.webdatacommons.org/16040808>	<http://www.w3.org/ns/prov#value>	"The element substrate 1 is a substrate where a silicon oxide film or a silicon nitride film for insulation and heat accumulation is formed on a substrate such as silicon or the like, and an electrical resistance layer and a wiring are patterned thereon." .
<http://webisa.webdatacommons.org/16040808>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/319385256>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/16040808> .