<http://webisa.webdatacommons.org/160545779>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/160545779>	<http://www.w3.org/ns/prov#value>	"Step 118 (etching) etches parts other than a developed resist image." .
<http://webisa.webdatacommons.org/prov/198606832>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/160545779> .
<http://webisa.webdatacommons.org/160545779>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .