<http://webisa.webdatacommons.org/161994053>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/161994053>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/285759050>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/161994053> .
<http://webisa.webdatacommons.org/161994053>	<http://www.w3.org/ns/prov#value>	"As shown, the insulative layer 14 has been etched to provide contact openings 16, 18 that can be contact holes, trenches, or other structure." .
<http://webisa.webdatacommons.org/prov/422899621>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/161994053> .