<http://webisa.webdatacommons.org/163531569>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/163531569>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/163531569>	<http://www.w3.org/ns/prov#value>	"An interconnection layer 16 made of a metallic material such as aluminum and an alloy of aluminum and silicon, is in contact with the n+ -diffusion region 21." .
<http://webisa.webdatacommons.org/prov/62320237>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/163531569> .