<http://webisa.webdatacommons.org/163898348>	<http://www.w3.org/ns/prov#value>	"Micromirror according to claim 1, wherein the reflecting area is a reflecting material disposed on a surface of a semiconductor layer of the mobile part." .
<http://webisa.webdatacommons.org/163898348>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/460941212>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/163898348> .
<http://webisa.webdatacommons.org/163898348>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .