<http://webisa.webdatacommons.org/163920593>	<http://www.w3.org/ns/prov#value>	"FIG. 4B is a plan view of an interior surface of a diaphragm portion of a capsule of the pressure sensor shown in FIG. 4A, according to some embodiments." .
<http://webisa.webdatacommons.org/163920593>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/163920593>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.es> .
<http://webisa.webdatacommons.org/prov/333054506>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/163920593> .